Trisilane is a chemical substance with a molecular structure consisting of three silicon atoms and a chemical formula of Si3H8. At room temperature and pressure, propylsilane appears as a colorless and easily self igniting liquid. It was discovered by Carol Bosky and Alfred Stoke in 1916. It is worth noting that since Trilane does not contain carbon, it is not an organic compound.
Its main uses are semiconductor silicon film manufacturing and amorphous silicon manufacturing.
