Anhui Argosun Electronic New Materials Co., Ltd

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Disilane (Si2H6)

Disilane is mainly used for epitaxial growth, oxide film, nitriding film, chemical vapor deposition and other aspects in the semiconductor industry. The deposition rate of Disilane is much faster than that of silane on amorphous silicon wafers, and the temperature can be reduced by 200 ~ 300 ° C.

Silane （SiH4）

The application of electronic grade silane is mainly concentrated in the field of microelectronics, which is used to manufacture high purity silane film and silicon nitride film. These films are widely used in the manufacturing process of microelectronic devices, such as microelectronic circuits, semiconductor devices, sensors, solar cells, etc.

Dichlorosilane （DCS）

Dichlorosilane can be used as high quality semiconductor silicon source material for chemical vapor deposition (CVD) process and silicon epitaxial chip growth process. In the semiconductor industry, dichlorosilane can be used as a reaction gas to produce silicon atoms and deposit silicon atoms on the substrate to produce silicon epitaxial sheets.

Trimethylsilane (3MS)

Trimethylsilane is used in the semiconductor industry to manufacture high-purity, high-performance thin film materials that are critical to the performance and stability of semiconductor devices.

Ammonia （NH3)

Electronic grade ammonia is a kind of high purity ammonia, the purity is generally more than 99.9999%, mainly used in electronics, microelectronics, electric power and other fields, used in thin film integrated circuit, after packaging, gas phase epitepity, chemical vapor deposition, lithography, wafer preparation and other processes, and can be used in semiconductor lighting, integrated circuit, flat panel display panel, solar cells and other optoelectronics and microelectronics fields.

Boron trichloride （BCl3）

Boron trichloride is a high-purity boron trichloride, mainly used in semiconductor and integrated circuit fields, with strong irreplaceability, can be used in silicon semiconductor devices and integrated circuit production of diffusion, ion implantation, dry etching and other processes, can also be used for aluminum, tungsten disilicide, titanium silicon alloy and other metals, metal compounds, alloy materials etching. It can also be used to manufacture high-purity boranes, chlorinated compounds and other important chemical raw materials. It should be noted that electronic grade boron trichloride is a toxic substance with corrosive and strong pungent odor, and special attention should be paid to safety issues during transportation and storage.

Diborane Mixtures （B2H6)

Diborane can be used as dopant source in semiconductor production, epitaxial growth, passivation, diffusion, ion implantation and other processes, and can also be used as high energy fuel for rockets and missiles, which has broad application prospects in aerospace field. Diborane can also be used in pharmaceutical, metal welding, organic synthesis and other fields, but safety measures need to be taken.

Hydrogen Bromide （HBr）

Hydrogen bromide is an inorganic compound, can be miscible with water, ethanol and acetic acid, colorless gas, has an important role and use in many fields, can manufacture a variety of bromine compounds, used as a reducing agent in the field of photochemistry and electrochemistry, electronic grade hydrogen bromide is widely used in the semiconductor industry in etching, doping, cleaning, epitaxy growth and other aspects.

Hydrogen Chloride (HCl）

Electronic grade hydrogen chloride is a high purity hydrogen chloride gas with a purity of more than 99.999%, mainly used in semiconductor, electronics, optoelectronics and other high-tech industries, can be used for the preparation of monocrystal silicon, optoelectronics, photovoltaic, flat panel display and other electronic industry fields, can also be used for silicon epitaxial growth, passivation and other aspects of integrated circuits.

Krypton (Kr)

Krypton gas is a gas with a molecular weight of 83.80, which has a very high melting point, boiling point, critical temperature and critical pressure, and is widely used in the electronics industry, electric light source industry, gas laser ion flow and mining lamp manufacturing. In addition, krypton gas has many applications in the aerospace field, such as as a propellant, a communication medium for space communications, and a medium for animal experiments in space biology.

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