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high quality Xenon (Xe)
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Gases
Precursors
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Nitrogen trifluoride (NF3)
Octafluorocyclobutane (C4F8)
Boron trichloride (BCl3)
Trimethylaluminum (TMA)
Disilane (Si2H6)
Pentakis(dimethylamino)tantalum (Ta(NC2H6)5)
Xenon (Xe)
Xenon (Xe)
Molecular weight: 131.29
Melting point: -111.79℃
Boiling point: -108.12℃
Critical temperature: 16.59℃
Critical pressure: 5.84
MPa
Critical volume: 118cm³/
mol
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