Boron trichloride is a high-purity boron trichloride, mainly used in semiconductor and integrated circuit fields, with strong irreplaceability, can be used in silicon semiconductor devices and integrated circuit production of diffusion, ion implantation, dry etching and other processes, can also be used for aluminum, tungsten disilicide, titanium silicon alloy and other metals, metal compounds, alloy materials etching. It can also be used to manufacture high-purity boranes, chlorinated compounds and other important chemical raw materials. It should be noted that electronic grade boron trichloride is a toxic substance with corrosive and strong pungent odor, and special attention should be paid to safety issues during transportation and storage.
