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reliable Hexachlorodisilane (HCDS)
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Trisilylamine (TSA)
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Hexachlorodisilane (HCDS)
Hexachloroethylsilane (chemical formula: Si2Cl6) is a colorless liquid that is prone to smoke in humid air. This compound is a chloride of silicon and can be regarded as an organic analogue of silicon.
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