Tungsten hexafluoride is an inorganic compound with colorless gas properties and soluble in organic solvents. It is mainly used in the field of integrated circuit manufacturing and chemical vapor deposition process, and can also be used as a raw material for fluorinating agents, polymerization catalysts and optical materials. In addition, it can also be used to manufacture low resistance, high melting point interconnect and tungsten tubes, calipers and other certain tungsten components.
